Ultrapure Water

Ultrapure water (UPW) is treated to the highest levels of purity for all contaminant types (e.g. organic and inorganic compounds, dissolved gases). It is required in laboratories and in the semiconductor industry as a solvent to prepare solutions and to clean surfaces.

Ionic and non-ionic contaminants can lead to defects in today’s high performance integrated circuits. Therefore, the industry sets premium purity standards and requires very fast rinse profiles to reduce downtimes of the plant.

The process flow below shows the different involvement of ion exchange resins – starting with a scavenger resin for the removal of organics, a softener to protect the RO plant, followed by semiconductor grade clean strong acid and strong base resins. The two following mixed bed filters with ultrapure grade resins are the last line of protection from trace of chemical contaminants.
Silica and boron are not well removed by membranes processes, but will be reduced below 1 ppb in subsequent ion exchange steps.

ultrapure water production - process flow

From primary treatment to final polishing, CHEMRA offers an extensive range of products and its expertise to assist the end user in the phases of ultra pure water production. These resins can be used either separately in large operating units or in ready to use mixed bed filters on industrial and laboratory scale.

CHEMRA range of Ultra Pure Water (UPW) ion exchange resins include:

Trademark
Type
Capacity
(eq/L)
Uniformity
Coefficient
Remarks

Cation removal

TREVERJET UPC1400/H
SAC
≥ 2.0
≤ 1.2
High operating capacity gel resin for individual exchanger
or together with UPA1400/OH in mixed bed unit
TREVERJET UPC4000/H
SAC
≥ 1.9
≤ 1.1
High purity, gel resin, for individual exchanger
or together with UPA4000/OH in mixed bed unit

Anion removal

TREVERJET UPA1400/OH
SBA
≥ 1.0
≤ 1.2
High operating capacity gel resin for individual exchanger
or together with UPC1400/H in mixed bed unit
TREVERJET UPA4000/OH
SBA
≥ 1.0
≤ 1.1
High purity, gel resin for individual exchanger
or together with UPC4000/OH in mixed bed unit

Mixed Bed

TREVERJET UPM1000
SAC/SBA
≥ 2.0/≥ 1.0
≤ 1.2
Regenerable mixed bed for the production of ultrapure water
TREVERJET UPM4000
SAC/SBA
≥ 1.9/≥ 1.0
≤ 1.1
Low rinse, high purity, low TOC and metals leakage.
Regenerable mixed bed for the production of ultrapure water
TREVERJET UPM4100
SAC/SBA
≥1.9 /≥ 1.0
≤ 1.1
Low rinse, very high purity, very low TOC and metals leakage.
Mixed bed for the polishing of ultrapure water